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Massachusetts Institute of Technology
6.777J | Design and Fabrication of Microelectromechanical Devices
6.777J
| Design and Fabrication of Microelectromechanical Devices
Massachusetts Institute of Technology
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Process Flow Design Challenge: Thermal Pneumatic Actuator
Massachusetts Institute of Technology
6.777J | Design and Fabrication of Microelectromechanical Devices
Lecture Note
