CHA Evaporator System - Edubirdie

University:
Boston University
Course:
CAS PY 521 | Electromagnetic Theory I
Academic year:

2023
Views:

190

Pages:

1
Author:

Hanusia3lug

• CHA Industries Solution System, a dual electron-beam and thermal evaporator is located in the Class-1000 cleanroom and is used to deposit thin films. • Metal is heated by an electron beam until it evaporates at temperatures as high as 3300°C. Low-melting point metal alloys are heated by an thermalsource, until the material inside evaporates, depositing a thin layer of metal. • The following materials are available in the system, AU, Ti, Ni, Cr, Al, and Ge.

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