Name: RTP-600S Rapid Thermal Processing System
Brand: EduBirdie
Rating: 5.0 (20 reviews)

University:
Boston University
Course:
CAS CS 320 | Concepts of Programming Languages
Academic year:

2023
Views:

254

Pages:

1
Author:

Rideinduhrtpi

RTP-600S Rapid Thermal Processing System Features • J-lighly Uniform lamp Array with Accurate lamp Control and Monitorini • C�uartz Process Chamber, СараЫе of Ha11clliпg lncrt and Rcactive Gases • Closed-loop Te111peraturc Control ,vith Temperalure Control StaЬility of +/- 2 from Setpoint •с • Doal Color Pyrometer with Auto-Calibration Feature • Up to 6 Cl1annels MFC Control • Controll ed Ramp-Up апd Ramp-Down R.1te 1 -200 "C/scc. Software Features The RTP-600S System is an Advanced Benchtop Rapid Thermal Processing System with Multi-Gas Capabilities. The RTP-600S is а versatile l>erкlнop RTP Systcm ,,vitl1 Multi-Gas capaЬility featuring ор to 6 Mass Flo,v Controlleditini and validation, and real-Ii111e process data acquisition, display, and analysis, and comprchcnsiv2 calibratio11 and y а doal col ,:>r pyrometer ог !урс К thermocotrple. AutomJted calibration routines provide simple Lrser calibration of lhe temperature measurement syslcm. Tl1ese featщes provide а l1igh level of process uniformity arкi repeatahi Iity. ·с • Real-Time Process ConIrol and Graphics Display • Rcal-Time Process DatJ Collcction (100 mscc time sampling) • Rccipe Editor witl1 Spreaclshect Format Oata cntry • Recipc Validation • Gas CompatiЬility Safety Cl1ecking DL1ring Rccipe Creatio11 • Process Data File Ma11agemcnt, Displuy, and Analysis • Systcm Diagnostics and Configuration Utilities

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